重复精度(Repeatability height):≤1um (4 Sigma);
volume/acreage:<1%(4 Sigma);
PCB载板尺寸(Maximum Loading PCB Size) : L460xW460mm
设备规格( Equipment Diemension and Weight) : 1000x1000x1525mm;865KG
电源(Power) : 220V、10A
气压(Air Pressure) : 4~6Bar
功率(启动/正常)Power (Start/nornmal) : 启动start:2.5kw /正常运转 normal operation:2kw
镜头解析度(Lens Resolution) : 15um,(18um/16.5um/13.5um as option)